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25/30495190 DC
BS ISO 19383 Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors
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| Označení normy: | 25/30495190 DC |
| Počet stran: | 21 |
| Vydáno: | 2025-05-01 |
| Status: | Draft for Comment |
DESCRIPTION
25/30495190 DC
This standard 25/30495190 DC BS ISO 19383 Atomic layer deposition - Chemical characteristics and related process specifications of atomic layer deposition precursors is classified in these ICS categories:
- 25.220.01 Surface treatment and coating in general