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>26/30510433 DC Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile
sklademVydáno: 2026-01-09
26/30510433 DC Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

26/30510433 DC

Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices Part 54: Silicon based MEMS fabrication technology - Test method of microstructure tensile

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Označení normy:26/30510433 DC
Počet stran:18
Vydáno:2026-01-09
Status:Draft for Comment
Alternativní označení:Draft BS EN 62047-54 Ed
DESCRIPTION

26/30510433 DC


This standard 26/30510433 DC Draft BS EN 62047-54 Ed.1.0 Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general

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