>BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films
sklademVydáno: 2008-10-31
BS EN 62374:2007
Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films
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Označení normy:
BS EN 62374:2007
Počet stran:
24
Vydáno:
2008-10-31
ISBN:
978 0 580 54048 6
Status:
Standard
DESCRIPTION
BS EN 62374:2007
This standard BS EN 62374:2007 Semiconductor devices. Time dependent dielectric breakdown (TDDB) test for gate dielectric films is classified in these ICS categories:
31.080.99 Other semiconductor devices
31.080.01 Semiconductor devices in general
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
