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Homepage>BS IEC 62047-46:2025 Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane
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sklademVydáno: 2025-04-30
BS IEC 62047-46:2025 Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

BS IEC 62047-46:2025

Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

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Označení normy:BS IEC 62047-46:2025
Počet stran:18
Vydáno:2025-04-30
ISBN:978 0 539 21850 3
Status:Standard
DESCRIPTION

BS IEC 62047-46:2025


This standard BS IEC 62047-46:2025 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices

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