PRICES include / exclude VAT
sklademVydáno: 2014-06-19
IEC 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 21: Méthode d'essai relative au coefficient de Poisson des matériaux MEMS en couche mince
Format
Availability
Price and currency
Anglicky/Francouzsky Hardcopy
skladem
94.02 €
Anglicky/Francouzsky PDF
Immediate download
Printable
94.02 €
| Označení normy: | IEC 62047-21:2014 |
| Vydáno: | 2014-06-19 |
| Edice: | 1 |
| ICS: | 31.080.99 |
| Počet stran (Anglicky/Francouzsky): | 26 |
| ISBN (Anglicky/Francouzsky): | 9782832216507 |
DESCRIPTION
IEC 62047-21:2014
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.