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sklademVydáno: 2022
ISO 18115-3:2022
ISO 18115-3:2022-Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
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| Označení normy: | ISO 18115-3:2022 |
| Počet stran: | 35 |
| Vydání: | 1 |
| Vydáno: | 2022 |
| Jazyk: | Anglicky |
| Počet stran (Anglicky): | 35 |
DESCRIPTION
ISO 18115-3:2022
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.