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Main page>IEC/TR 63258:2021-Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
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sklademVydáno: 2021
IEC/TR 63258:2021-Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films

IEC/TR 63258:2021

IEC/TR 63258:2021-Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films

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119.62 €
Označení normy:IEC/TR 63258:2021
Počet stran:16
Vydání:1
Vydáno:2021
Jazyk:Anglicky
DESCRIPTION

IEC/TR 63258:2021


IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
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