This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).

This document does not apply to the following:

• health and safety requirements;
• compatibility with cleaning agents and techniques;
• cleanability;
• biocontamination;
• specific requirements of equipment and materials for processes and products;
• design details of equipment.