PRICES include / exclude VAT
sklademVydáno: 2026-06-01
ISO 19383:2026
ISO 19383:2026 - Atomic layer deposition — Chemical characteristics and related process specifications of atomic layer deposition precursors
Format
Availability
Price and currency
Anglicky PDF
Immediate download
Printable
118.08 €
Anglicky Hardcopy
skladem
118.08 €
| Označení normy: | ISO 19383:2026 |
| Vydání: | 1 |
| Vydáno: | 2026-06-01 |
| Počet stran (Anglicky): | 13 |
DESCRIPTION
ISO 19383:2026
This document defines the chemical characteristics and related process specifications of atomic layer deposition precursors, including assay content, metal purity and anion content specification.