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sklademVydáno: 2026-01-30
ISO 23131-3:2026
ISO 23131-3:2026 - Ellipsometry — Part 3: Transparent single layer model
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| Označení normy: | ISO 23131-3:2026 |
| Vydání: | 1 |
| Vydáno: | 2026-01-30 |
| Počet stran (Anglicky): | 29 |
DESCRIPTION
ISO 23131-3:2026
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
