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>BS ISO 19383:2026 Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors
sklademVydáno: 2026-06-03
BS ISO 19383:2026 Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors

BS ISO 19383:2026

Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors

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Označení normy:BS ISO 19383:2026
Počet stran:22
Vydáno:2026-06-03
ISBN:978 0 539 32348 1
Status:Standard
DESCRIPTION

BS ISO 19383:2026


This standard BS ISO 19383:2026 Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors is classified in these ICS categories:
  • 25.220.01 Surface treatment and coating in general

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