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sklademVydáno: 2026-06-03
BS ISO 19383:2026
Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors
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| Označení normy: | BS ISO 19383:2026 |
| Počet stran: | 22 |
| Vydáno: | 2026-06-03 |
| ISBN: | 978 0 539 32348 1 |
| Status: | Standard |
Popis
BS ISO 19383:2026
This standard BS ISO 19383:2026 Atomic layer deposition. Chemical characteristics and related process specifications of atomic layer deposition precursors is classified in these ICS categories:
- 25.220.01 Surface treatment and coating in general