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BS IEC 62047-41:2021
Semiconductor devices. Micro-electromechanical devices RF MEMS circulators and isolators
Semiconductor devices. Micro-electromechanical devices RF MEMS circulators and isolators
Vydáno: 2021-06-28
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BS EN 62047-9:2011
Semiconductor devices. Micro-electromechanical devices Wafer to wafer bonding strength measurement for MEMS
Semiconductor devices. Micro-electromechanical devices Wafer to wafer bonding strength measurement for MEMS
Vydáno: 2013-01-31
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BS EN 60747-16-3:2002+A2:2017
Semiconductor devices Microwave integrated circuits. Frequency converters
Semiconductor devices Microwave integrated circuits. Frequency converters
Vydáno: 2018-02-23
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BS IEC 60747-18-1:2019
Semiconductor devices Semiconductor bio sensors. Test method and data analysis for calibration of lens-free CMOS photonic array sensors
Semiconductor devices Semiconductor bio sensors. Test method and data analysis for calibration of lens-free CMOS photonic array sensors
Vydáno: 2019-06-07
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BS EN 62047-2:2006
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
Vydáno: 2006-11-30
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BS IEC 62047-37:2020
Semiconductor devices. Micro-electromechanical devices Environmental test methods of MEMS piezoelectric thin films for sensor application
Semiconductor devices. Micro-electromechanical devices Environmental test methods of MEMS piezoelectric thin films for sensor application
Vydáno: 2023-04-05
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BS IEC 62047-49:2025
Semiconductor devices. Micro-electromechanical devices Temperature and humidity test methods for piezoelectric MEMS cantilevers
Semiconductor devices. Micro-electromechanical devices Temperature and humidity test methods for piezoelectric MEMS cantilevers
Vydáno: 2025-12-03
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