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BS EN IEC 62047-52 Semiconductor devices. Micro-electromechanical devices Part 52. Biaxial tensile testing method for stretchable MEMS
BS EN IEC 62047-52 Semiconductor devices. Micro-electromechanical devices Part 52. Biaxial tensile testing method for stretchable MEMS
Vydáno: 2024-09-13
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BS IEC 62047-37:2020
Semiconductor devices. Micro-electromechanical devices Environmental test methods of MEMS piezoelectric thin films for sensor application
Semiconductor devices. Micro-electromechanical devices Environmental test methods of MEMS piezoelectric thin films for sensor application
Vydáno: 2023-04-05
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BS IEC 62951-1:2017
Semiconductor devices. Flexible and stretchable semiconductor devices Bending test method for conductive thin films on flexible substrates
Semiconductor devices. Flexible and stretchable semiconductor devices Bending test method for conductive thin films on flexible substrates
Vydáno: 2018-05-04
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BS EN 62047-10:2011
Semiconductor devices. Micro-electromechanical devices Micro-pillar compression test for MEMS materials
Semiconductor devices. Micro-electromechanical devices Micro-pillar compression test for MEMS materials
Vydáno: 2011-09-30
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BS EN 62047-13:2012
Semiconductor devices. Micro-electromechanical devices Bend-and shear-type test methods of measuring adhesive strength for MEMS structures
Semiconductor devices. Micro-electromechanical devices Bend-and shear-type test methods of measuring adhesive strength for MEMS structures
Vydáno: 2012-05-31
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