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sklademVydáno: 2025-08-26
25/30510635 DC
Draft BS EN 63567-3 Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment Part 3: Nano-scale wafer surface inspection method using UV light
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| Označení normy: | 25/30510635 DC |
| Počet stran: | 25 |
| Vydáno: | 2025-08-26 |
| Status: | Draft for Comment |
| Počet stran (Anglicky): | 25 |
Popis
25/30510635 DC
This standard 25/30510635 DC Draft BS EN 63567-3 Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment is classified in these ICS categories:
- 31.080.01 Semiconductor devices in general