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sklademVydáno: 2025-04-30
BS IEC 62047-46:2025
Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane
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4740 Kč
Označení normy: | BS IEC 62047-46:2025 |
Počet stran: | 18 |
Vydáno: | 2025-04-30 |
ISBN: | 978 0 539 21850 3 |
Status: | Standard |
Popis
BS IEC 62047-46:2025
This standard BS IEC 62047-46:2025 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices