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>BS ISO 17109:2022 - TC Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films
sklademVydáno: 2023-01-03
BS ISO 17109:2022 - TC Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films

BS ISO 17109:2022 - TC

Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films

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Označení normy:BS ISO 17109:2022 - TC
Počet stran:68
Vydáno:2023-01-03
ISBN:978 0 539 24254 6
Status:Tracked Changes
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BS ISO 17109:2022 - TC


This standard BS ISO 17109:2022 - TC Tracked Changes. Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter dept profiling using single and multi-layer thin films is classified in these ICS categories:
  • 71.040.40 Chemical analysis

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