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sklademVydáno: 2022-08-03
BS ISO 23170:2022
Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering
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| Označení normy: | BS ISO 23170:2022 |
| Počet stran: | 38 |
| Vydáno: | 2022-08-03 |
| ISBN: | 978 0 539 14473 4 |
| Status: | Standard |
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BS ISO 23170:2022
This standard BS ISO 23170:2022 Surface chemical analysis. Depth profiling. Non-destructive depth profiling of nanoscale heavy metal oxide thin films on Si substrates with medium energy ion scattering is classified in these ICS categories:
- 71.040.40 Chemical analysis