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BS EN 62047-6:2010
Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
Vydáno: 2010-04-30
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BS EN 62047-18:2013
Semiconductor devices. Micro-electromechanical devices Bend testing methods of thin film materials
Semiconductor devices. Micro-electromechanical devices Bend testing methods of thin film materials
Vydáno: 2013-10-31
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BS EN 62047-22:2014
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Vydáno: 2014-10-31
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BS IEC 62047-53:2025
Semiconductor devices. Micro-electromechanical devices MEMS electrothermal transfer device
Semiconductor devices. Micro-electromechanical devices MEMS electrothermal transfer device
Vydáno: 2025-10-08
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BS EN IEC 60747-16-9:2024
Semiconductor devices Microwave integrated circuits. Phase shifters
Semiconductor devices Microwave integrated circuits. Phase shifters
Vydáno: 2024-11-20
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BS IEC 62047-44:2024
Semiconductor devices. Micro-electromechanical devices Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
Semiconductor devices. Micro-electromechanical devices Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
Vydáno: 2024-02-29
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