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sklademVydáno: 2024
ISO 19606:2024
ISO 19606:2024-Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy
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| Označení normy: | ISO 19606:2024 |
| Počet stran: | 24 |
| Vydání: | 2 |
| Vydáno: | 2024 |
| Jazyk: | Anglicky |
| Počet stran (Anglicky): | 24 |
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ISO 19606:2024
This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 μm to 2,5 μm.