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BS IEC 62047-30:2017
Semiconductor devices. Micro-electromechanical devices Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
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| Označení normy: | BS IEC 62047-30:2017 |
| Počet stran: | 24 |
| Vydáno: | 2017-10-09 |
| ISBN: | 978 0 580 93578 7 |
| Status: | Standard |
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BS IEC 62047-30:2017
This standard BS IEC 62047-30:2017 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.140 Piezoelectric devices
- 31.080.99 Other semiconductor devices
This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.