BS IEC 62047-34:2019

This standard BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:

• 31.140 Piezoelectric devices
• 31.080.99 Other semiconductor devices

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.