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BS EN 62047-20:2014
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Vydáno: 2014-10-31
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BS IEC 62047-36:2019
Semiconductor devices. Micro-electromechanical devices Environmental and dielectric withstand test methods for MEMS piezoelectric thin films
Semiconductor devices. Micro-electromechanical devices Environmental and dielectric withstand test methods for MEMS piezoelectric thin films
Vydáno: 2019-04-24
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BS EN 62047-14:2012
Semiconductor devices. Micro-electromechanical devices Forming limit measuring method of metallic film materials
Semiconductor devices. Micro-electromechanical devices Forming limit measuring method of metallic film materials
Vydáno: 2012-05-31
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BS EN 62047-3:2006
Semiconductor devices. Micro-electromechanical devices Thin film standard test piece for tensile testing
Semiconductor devices. Micro-electromechanical devices Thin film standard test piece for tensile testing
Vydáno: 2006-11-30
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BS IEC 62047-34:2019
Semiconductor devices. Micro-electromechanical devices Test methods for MEMS piezoresistive pressure-sensitive device on wafer
Semiconductor devices. Micro-electromechanical devices Test methods for MEMS piezoresistive pressure-sensitive device on wafer
Vydáno: 2019-04-16
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BS IEC 62951-5:2019
Semiconductor devices. Flexible and stretchable semiconductor devices Test method for thermal characteristics of flexible materials
Semiconductor devices. Flexible and stretchable semiconductor devices Test method for thermal characteristics of flexible materials
Vydáno: 2019-03-05
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