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sklademVydáno: 2020
ISO 22278:2020
ISO 22278:2020-Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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| Označení normy: | ISO 22278:2020 |
| Počet stran: | 29 |
| Vydání: | 1 |
| Vydáno: | 2020 |
| Jazyk: | Anglicky |
Popis
ISO 22278:2020
This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.