ISO 23833:2013 defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order.

ISO 23833:2013 is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of ISO 23833:2013 are applicable to those documents relevant to the practices of related fields (SEM, AEM, EDX, etc.) for definition of those terms common to them.