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sklademVydáno: 2013
ISO 25178-603:2013
ISO 25178-603:2013-Geometrical product specifications (GPS) — Surface texture: Areal-Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
Měna
| Označení normy: | ISO 25178-603:2013 |
| Počet stran: | 28 |
| Vydání: | 1 |
| Vydáno: | 2013 |
Popis
ISO 25178-603:2013
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
