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Hlavní stránka>ISO/TS 22933:2022-Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
sklademVydáno: 2022
ISO/TS 22933:2022-Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

ISO/TS 22933:2022

ISO/TS 22933:2022-Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS

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Označení normy:ISO/TS 22933:2022
Počet stran:15
Vydání:1
Vydáno:2022
Jazyk:Anglicky
Počet stran (Anglicky):15
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ISO/TS 22933:2022


This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.