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sklademVydáno: 2022-04-01
ISO/TS 22933:2022
ISO/TS 22933:2022 - Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
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| Označení normy: | ISO/TS 22933:2022 |
| Vydání: | 1 |
| Vydáno: | 2022-04-01 |
| Počet stran (Anglicky): | 15 |
Popis
ISO/TS 22933:2022
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.