This part of IEC 63041 is applicable to piezoelectric physical sensors mainly used in the field of process control, wireless monitoring, dynamics, thermodynamics, vacuum engineering, and environmental sciences. This document provides users with technical guidelines as well as basic knowledge of common physical sensors. Piezoelectric sensors covered herein are those applied to the detection and measurement of physical quantities such as force, pressure, torque, viscosity, temperature, film thickness, acceleration, vibration, and tilt angle.