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sklademVydáno: 2021-07-09
21/30440431 DC
BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Part 4. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence
Měna
| Označení normy: | 21/30440431 DC |
| Počet stran: | 26 |
| Vydáno: | 2021-07-09 |
| Status: | Draft for Comment |
Popis
21/30440431 DC
This standard 21/30440431 DC BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices
