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sklademVydáno: 2026-07-03
26/30551908 DC
BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation
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| Označení normy: | 26/30551908 DC |
| Počet stran: | 19 |
| Vydáno: | 2026-07-03 |
| Status: | Draft for Comment |
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26/30551908 DC
This standard 26/30551908 DC BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems is classified in these ICS categories:
- 31.080.01 Semiconductor devices in general